Facilities

Custom-made ESR-STM-AFM System #1
(Multidisciplinary Research Building B116)

• Ideal for vdW devices
• In-situ MBE growth
• Close-cycle JT cryocooling
• ESR capability w/ 1T magnet

Custom-made ESR-STM-AFM System #2
(Multidisciplinary Research Building B116)

• Ideal for vdW devices
• In-situ MBE growth
• Close-cycle JT cryocooling
• ESR capability w/ 1T magnet

2D material fabrication
(Room B161-167, West, School of Physics)

• Mechanical exfoliation of 2D materials on the working bench (graphene, hBN, TMDs, etc.)
• Optical inspection under microscope objectives (5×, 10×, 20×, 50×, 100×)
• Chemical preparation in the fume hood (PC, PPC, PVA and related transfer solutions)
• Device assembly using the transfer stage

Growth furnaces & misc.
(Room B161-167, West, School of Physics)

• CVT furnace: Single-crystal growth via iodine transport in a dual-zone furnace
• CVD furnace: Thin-film and 2D material growth with controlled precursor gas flow
• Muffle furnace: Polycrystal growth and high-temperature annealing

Shared facility:

Room-temperature AFM-STM
(Faculty of Engineering, B2-072-18)

Nanofabrication Facilities
（Room 202, East, School of Physics）

Internal Wiki: http://icqmnanofab.pku.edu.cn

Atomic Force Microscope (AFM)
Reactive Ion Etching System (RIE)
Electron-Beam Evaporation System
Spot Welder
Helium Leak Detector
FIB/SEM DualBeam Microscope
Wire Bonder